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SiC Extra High Temperature Process Equipment

Ailesic TOYOKO KAGAKU

SiC Extra High Temperature Process Equipment Series

SiC power device has recently been becoming a key technology to realize a 'low-carbon society'.

We, Toyoko-Kagaku, have worked on a development of SiC thermal process equipment by applying our original extra high temperature technologies since 2000, and thanks to concentrate our long experience, knowhow and the latest technologies, we have succeeded to realize superior quality and performance for SiC thermal processes on our "Ailesic" Series.

"Ailesic" provides tremendous improvement of SiC devise performances and contributes to stability of mass production.

Activation Anneal Ailesic-2000

Activation Anneal Ailesic-2000
Features
Max temp: 2000 degree C to adapt SiC activation anneal process
Extra rapid heating and cooling concept, realized by our original technology, contributes to minimize process time and adapt customer needs for small lot production and development stage
Superior stability of process performance, realized by our heating and precise temp control technologies, contributes to stable mass-production
Various lineup:
4 inch R&D to 6 inch extra high throughput mass-production models
Good reputation for operational experience in mass-production fab
Applications
Activation Anneal process ( Post Implantation Anneal )

Oxidation/Nitridization/Anneal Ailesic-1400/1500/1700

Oxidation/Nitridization/Anneal Ailesic-1700/1400
Features
Max temperature: 1400/1500/1670 degree C to adapt most of SiC high temperature thermal processes
Ultra clean process condition and extra high running rate are realized by our original In-Situ Cleaning and part cleaning technologies.
Extremely low running cost is realized by our original heater design and process jig formation technology.
Ultra clean, high vacuum and extra high temp processes with RTP ( Rapid Thermal Process ) function are available by using original technology
Various lineup:
4 inch R&D to 6 inch mass-production models So many and long experiences of running in mass-production fabs
Applications
Oxidation ( O2 )
Post Oxidation Anneal（N2O、NO）
Anneal ( N2, Ar )

R&D Extra High Temp Thermal process Ailesic-X

R&D Extra High Temp Thermal process Ailesic-X
* One of examples. Depend on specification required by customer.
Features
Fully customized extra high temperature furnace for R&D and/or Special needs using substrates of Si, SiC, GaN and etc.
Process Temperature: 400 - 1950 degree C ( can be selectable )
Ultra clean process condition is available by using our original In-Situ Cleaning and part cleaning technologies
Corrosive/toxic gases are available by using our original anti-corrosion and gas sealing technologies
Ultra clean, high vacuum and extra high temp processes with RTP ( Rapid Thermal Process ) function are available by using original technology
So many delivery results to Research Institutes and Universities
Applications
Oxidation ( O2 )
Post Oxidation Anneal（N2O、NO）
Anneal ( N2, Ar )
Activation Anneal process ( Post Implantation Anneal )
and others

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